 A semiconductor laser based on the effect of photonic band gap crystal mediated filtration of higher
专利摘要:
The present invention discloses a semiconductor laser having a narrow beam divergence angle. Such a laser comprises at least one waveguide, the waveguide comprising an active layer generating a predetermined optical gain upon injection of a current, a photonic bandgap determination in which refractive index modulation is performed in a direction perpendicular to the propagation direction of the emitted light, and at least one waveguide. Has a defect. The active layer is preferably arranged inside the defect. The photon band gap determination and defects are optimized to extend over the photon band gap determination, while the basic mode of laser radiation is confined to and decayed from the defect. As the basic mode is confined to defects, the amplitude of the basic mode is increased relative to the other modes. Therefore, compared with the restraint rate of the other mode, the restraint rate of the basic mode is larger. This allows for efficient single mode lasing from lasers containing long waveguides. 公开号:KR20040035752A 申请号:KR10-2004-7003245 申请日:2002-08-29 公开日:2004-04-29 发明作者:비탈리 쉬추킨；니콜라이 레덴초브 申请人:피비씨 레이저스 리미티드； IPC主号:
专利说明:
A SEMICONDUCTOR LASER BASED ON THE EFFECT OF PHOTONIC BAND GAP CRYSTAL MEDIATED FILTRATION OF HIGHER MODES OF LASER RADIATION AND METHOD OF MAKING SAME} [2] High power semiconductor lasers play an important role in telecommunication systems and are used in pumps, fiber amplifiers, and other applications. [3] In the case of single-sided lasers, long waveguides are generally used to achieve low power density and narrow beam divergence angle per facet. However, due to the multi-mode nature of the laser radiation, the width reduction over a large width of the far field pattern is limited. [4] The prior art in the field of single-sided light emitting lasers having a narrow beam divergence angle includes basically the concept of leaky wave diode lasers which achieve such a narrow beam divergence angle. An example of such a prior art is disclosed in US Pat. No. 4,328,469, entitled "High output power injection lasers," issued May 4, 1982. The patent discloses a heterostructure implantable laser in which an active layer is sandwiched between a pair of moderately refractive indices. Between the active layer and the layer having a moderate refractive index may be a very thin thin film layer having low refractive index and high band gap characteristics. This thin film layer may be applied in various combinations to produce a basic mode guiding effect. [5] The main disadvantage of these devices is the extremely low constraint of the fundamental mode. As a result, the manufacture of high power lasers is impossible. Therefore, there is a need in the art for a laser that realizes a narrow beam divergence angle and high power. [1] The present invention relates to the field of semiconductor devices, and more particularly to a semiconductor laser having a narrow beam divergence angle. [7] 1 illustrates an embodiment of a laser of the present invention in which a waveguide of a laser structure includes a photon band gap crystal formed by alternating layers having a high refractive index and a layer having a low refractive index periodically, and defects that localize photons. As a schematic diagram, showing the refractive index profile of a given embodiment and the alloy composition profile of a particular embodiment where the refractive index modulation is realized by adjusting the alloy composition (x) of the Ga 1-x Al x As alloy. [8] FIG. 2 is a schematic diagram showing one embodiment of the laser of the present invention wherein a single high refractive index layer is included in the defect and the thickness of the layer exceeds the thickness of the layer of the photonic bandgap crystal, which also has a high refractive index. [9] FIG. 3 is a schematic diagram showing another embodiment of the present invention in which a single layer having a higher refractive index than that of a layer of photon bandgap crystals constitutes part of a defect defined. [10] FIG. 4 shows another embodiment of the present invention in which a single low refractive index layer separates two adjacent high refractive index layers, the thickness of which is thinner than other layers of the low refractive index photonic bandgap crystal. Schematic leading. [11] FIG. 5 is a schematic diagram showing another embodiment of the present invention in which a single layer having a moderate refractive index separates two layers of high refractive index adjacent thereto. [12] FIG. 6 shows the refractive indices of the laser shown in FIG. 2 and the relative electric field intensities of the basic electrical transverse wave (hereinafter simply described as TE) mode and the first order TE mode. [13] FIG. 7 is a schematic diagram illustrating another embodiment of the present invention in which an absorber layer is disposed in one of the layers of the photon bandgap crystal. FIG. [14] FIG. 8 is a schematic diagram showing another embodiment of the present invention in which a high refractive index layer and a low refractive index layer are separated by a focused layer. [15] FIG. 9 is a schematic diagram showing another embodiment of the present invention in which an absorber layer is disposed in one of the layers of the photon band gap crystal and the focused layer separates the high refractive index layer from the low refractive index layer. [16] FIG. 10 shows refractive index profiles and electric field intensities of a basic TE mode and a first order TE mode, in which the electric field of the basic mode in the absorber is compared with the electric field of the first rank mode of the example of the embodiment shown in FIG. 9. Drawing showing that it is quite suppressed. [17] FIG. 11 shows the electric field intensity of the first, second, third and fourth rank TE modes of the example shown in FIG. 9 in comparison with the electric field strength of the basic mode while showing its refractive index profile. [18] FIG. 12 shows a far-field pattern of an example laser of the embodiment shown in FIG. 9; FIG. [19] FIG. 13 is a schematic diagram showing another embodiment of the present invention in which an active region is surrounded by a thin film barrier. FIG. [20] FIG. 14 is a schematic diagram showing another embodiment of the present invention in which an absorber layer is disposed in one of the layers of the photon band gap crystal and the active region is surrounded by a thin film barrier. [21] Fig. 15 is a schematic diagram showing another embodiment of the present invention in which a high refractive index layer and a low refractive index layer are separated by a focusing layer and an active region is surrounded by a thin film barrier. [22] FIG. 16 includes an absorber layer disposed in one of the layers of a photonic bandgap crystal, a focused layer separating a high refractive index layer and a low refractive index layer, and a thin film barrier surrounding the active region. Schematic diagram showing another embodiment of the. [23] FIG. 17 is a schematic diagram showing another embodiment of the present invention, wherein the active region is disposed in one of the layers of the photon bandgap crystal, and the defect localized photon has only passive elements. [24] FIG. 18 is a schematic diagram illustrating another embodiment of the present invention wherein photon bandgap crystals with refractive index modulation laterally introduced into a vertical resonant surface emitting laser (VCSEL). FIG. [6] Therefore, the present specification discloses a semiconductor laser having a narrow beam divergence angle. Such a laser comprises at least one waveguide, the waveguide comprising an active layer generating a predetermined optical gain upon injection of a current, a photonic bandgap determination in which refractive index modulation is performed in a direction perpendicular to the propagation direction of the emitted light, and at least one waveguide. It has a defect. The active layer is preferably arranged inside the defect. The photon band gap determination and defects are optimized to extend over the photon band gap determination, while the basic mode of laser radiation is confined to and decayed from the defect. As the basic mode is confined to defects, the amplitude of the basic mode is increased relative to the other modes. Therefore, compared with the restraint rate of the other mode, the restraint rate of the basic mode is larger. This allows for efficient single mode lasing from lasers containing long waveguides. [25] The object of the single-sided light emitting semiconductor laser of the present invention is to achieve a radiation of a narrow far field pattern. Achieving this goal is usually manifested in the use of long waveguides. The main disadvantage of current waveguides is that due to the multi-mode nature of laser radiation, complex pristine field patterns and wide beam divergence angles result. To suppress the higher mode while providing the rational restraint of the fundamental mode, it is necessary to design the waveguide into a specific structure. [26] The present invention recommends the use of a geometrical photon band gap crystal in which the generated light propagates in a direction perpendicular to the refractive index modulation direction. In particular, in the single-sided light emitting semiconductor laser of the present invention, the photon band gap crystal is a one-dimensional structure in which layers in which the refractive index n is modulated in the vertical direction z (n = n (z)) are periodically arranged. . In addition, the electric field strength in the so-called TE mode can be represented by the following equation. [27] [28] Here, the value exp [iβx] represents the propagation along the waveguide in the x-direction, and the amplitude E y (z) represents the change in intensity of the electric field across the waveguide. This amplitude is part of a wavelength equation (e.g., a semiconductor laser from Academic Press, New York, published in 1978 by HCCasey and MBPanish). (See pages 32-43 and 70-79 of A). [29] [30] In the determination of the photon bandgap with infinite perfect periodicity, the spectrum is a tolerant band having a frequency (ω) and a constant (β) when the electromagnetic wave is a periodic wavelength propagating throughout the crystal, and the prohibition of propagation of the electromagnetic wave is impossible. It consists of intervals. In a practical system, perfect periodicity is broken by the termination of a continuous layer or of some type of defect that violates the periodic refractive index profile. The defect may carry out localization or departure of electromagnetic waves in the z-direction. In the case of localized defects, two types of electromagnetic waves are possible. These possible electromagnetic waves propagate along the waveguide in the x-direction, extending first across the waveguide in the x-direction, confined by defects in the z-direction, and propagating along the photonic bandgap in the z-direction. Wavelength. [31] Thus, the single-sided laser of the present invention comprises two main elements. The main elements are firstly photon bandgap crystals in which the refractive index is modulated in the vertical direction, and secondly, defects in which the active area of the laser is preferably disposed therein. The photon band gap determination and its defects are removed by one and only one mode of laser radiation decayed from the defects in the z-direction confined by the defect, while the other mode is z-direction across the photon band gap determination. It is configured to extend. [32] The performance of a defect that limits the mode of laser radiation depends on two parameters. The first parameter is the difference in refractive index Δn between the refractive index of the defect and the reference layer of the photon band gap determination, and the second parameter is the volume of the defect. In the case of the laser of the invention in which the refractive index is modulated in only one direction (n = n (z)), the second parameter is the thickness of the defect. In general, as the value Δn increases with the thickness of the defect fixed, the number of modes confined by the defect also increases. Even when the thickness of the defect increases in a state where the value Δn is fixed, the number of modes limited by the defect increases. The construction of the laser of the invention is made by selecting these two parameters, the value Δn and the thickness of the defect, so that one and only mode of laser radiation is limited by the defect. The other mode is a mode extending in the z-direction over the photon band gap determination. [33] A preferred embodiment of the present invention provides a laser having an active region disposed in a defect region of a waveguide in which the basic mode of laser radiation is confined. The required local length of this basic mode is determined by the interaction of the two trends. The confined length should, on the one hand, be long enough to provide a narrow field of view beam divergence, and on the other hand, shorter than the length of the photon band gap crystal. This confined length allows the fundamental mode to be effectively confined to the total thickness scale of the photon band gap crystals, thereby allowing the field strength of the fundamental mode to be significantly increased compared to the electric field strength of other modes. Certain embodiments of the laser of the present invention achieve a beam divergence angle of 4 ° while standard dual with a GaAs cavity of 0.8 μm and a Ga 1-x Al x As cladding layer (where x is 0.3). The restraint rate in the heterostructure laser is 0.11. [34] With particular reference to FIG. 1, there is shown a first embodiment of a novel cross-sectional light emitting semiconductor laser 100 obtained in accordance with the present invention using photon bandgap crystallographic filtration of laser radiation in a high mode. The structure is obtained by epitaxial growth on the substrate 102, and then an n-doped buffer layer 103 is formed. [35] Substrate 102 is preferably formed of a III-V semiconductor material or a III-V semiconductor alloy, such as GaAs, InP, GaSb or other materials. As the material of the substrate 102 of the present invention, GaAs is preferable. The n-emitter 103 is formed of a material that is lattice matched or nearly lattice matched to the substrate, which is transmissive to the generated light, and is preferably doped with donor impurities. In a preferred embodiment, the n-emitter 103 is made of the same material as the substrate, for example GaAs. Possible donor impurities for this n-emitter 103 layer include, but are not limited to, amphoteric impurities such as S, Se, Te, or Si, Ge, and Sn. In particular, the latter impurity groups are introduced under these technical conditions such that they are predominantly incorporated into the cationic sublattice and act as donor impurities. For example, the n-doped layer is a GaAs or GaAlAs layer grown by molecular beam epitaxy and doped with impurity Si having a concentration of 2 × 10 17 cm −3 , and an n + -doped layer 103 is a GaAlAs layer grown by molecular beam epitaxy and doped with impurity Si having a concentration of 3 × 10 18 cm −3 . In a preferred embodiment, the n-doped layer 103 comprises one or more layers, for example layered n + -n structures and the like. [36] Next to these layers is a photon bandgap crystal 120 having n periods. Each cycle consists of a low refractive index n-doped layer 104 and a high refractive index n-doped layer 105. Thus, the photon band gap crystal 120 is composed of n periods each composed of an n-doped layer 104 and an n-doped layer 105. This photon bandgap crystal 120 is formed of a material that is lattice matched to or substantially lattice matched to the substrate 102, and is preferably translucent to emitted light. In one embodiment of the device on a GaAs substrate, the preferred embodiment is an alloy Ga 1-x Al x As with an adjusted aluminum composition (x). All layers 104 and 105 of the photon bandgap crystal 120 must be n-doped. The number of cycles, the thickness of each layer and the alloy composition of each layer are chosen to provide the confinement of one and only one mode of laser radiation in the z-direction. [37] The photon band gap crystal 120 is surrounded by a layer 104 having a low refractive index on one side and a defect 121 on the other side. The layers arranged in the periodic order of the photonic bandgap crystals 120 are followed by a special design defect 121, which is a thick n-doped layer 106 and a relatively thin, weakly n-doped or undoped layer. An undoped layer 107, an active region 108, a lightly p-doped or undoped layer 109, and a thick p-doped layer 110. Defect 121 serves to localize photons. The active region 108 or the light generating layer is preferably disposed inside the defect 121. However, as shown in FIG. 17, active region 108 may also be disposed outside of defect 121. Layers 106 and 110 are formed of a material that is lattice matched to or substantially lattice matched to substrate 102 and is preferably translucent to emitted light. In this embodiment of the device on GaAs substrate 102, the preferred material for layers 106 and 110 is GaAs or Ga 1-x Al x As. The preferred material for the lightly doped or undoped layers 107, 109 is GaAs or Ga 1-x Al x As. [38] The active region 108 is preferably formed by insertion, the energy band spacing being narrower than the energy band spacing of the substrate 102. Possible active regions 108 include, but are not limited to, monolayer or multilayer systems of quantum well structures, quantum wire structures, quantum dot structures, or combinations thereof. In this embodiment of the device on a GaAs substrate, preferred embodiments of the active element include, but are not limited to, InAs, In 1-x Ga x As, In x Ga 1-xy Al y As, In x Ga 1 -x As 1-y N y , or an insertion system of similar material. Light 122 is emitted from the cross section of the laser 100. This light 122 propagates in a direction perpendicular to the plane of FIG. 1. [39] The defect 121 is followed by a p-doped layer 111 having a low refractive index, a p-doped layer 112 having a moderate refractive index, a thick p-doped layer 113 having a low refractive index, and a thick p-doped layer. Buffer layer 114 comes on. These layers 111, 112, 113 are p-doped layers, formed of a material that is lattice matched to or substantially lattice matched to the substrate 102 and are preferably translucent to emitted light. In this embodiment of the device on the GaAs substrate, the preferred material for these layers is alloy Ga 1-x Al x As with the adjusted aluminum composition (x). The layer 111 preferably has a low refractive index, the layer 112 preferably has a moderate or high refractive index, and the layer 113 preferably has a low refractive index. [40] The p-doped contact layer 114 is formed of a lattice matched or near lattice matched material with respect to the substrate 102 and is transmissive to the generated light and is preferably doped with acceptor impurities. In a preferred embodiment, this layer 114 is made of the same material as the substrate, for example GaAs. Possible acceptor impurities include, but are not limited to, amphoteric impurities such as Be, Mg, Zn, Cd, Pb, Mn or Si, Ge and Sn. The latter impurity group is introduced under these technical conditions such that they are predominantly incorporated into the anion sublattice and act as acceptor impurities. For example, the p-doped layer is a GaAs or GaAlAs layer grown by molecular beam epitaxy and doped with impurity Be having a concentration of 2 × 10 17 cm −3 , and the p + -doped layer 103 is a molecule GaAlAs layer grown by beam epitaxy and doped with impurity Be having a concentration of 2 × 10 19 cm −3 . In a preferred embodiment, the p-doped layer 114 includes one or more layers, such as layered p + -p structures and the like. Preferred numerical values for the refractive indices of the various layers are described in the description of FIG. 6 below. [41] The entire structure thus obtained is disposed between the n-contact layer 101 and the p-contact layer 115. These contact layers 101 and 115 are preferably formed of a multilayer metal structure. The n-contact layer 101 is preferably, but not limited to, formed of a material having a three-layer structure of Ni-Au-Ge. The p-contact layer 115 may be formed of a material having a three-layer structure of Ti-Pt-Au, but not limited thereto. [42] The waveguide of the laser 100 preferably includes a photon band gap crystal 120, a defect 121, a layer 111 having a low refractive index, and a layer 112 having a moderate refractive index. Layer 104 and layer 113 located above n-emitter 103 serve as the cladding layer of laser 100. The photon band gap crystal 120, the number of cycles thereof, the period, the thickness and refractive index of each layer belonging to one period of the photon band gap crystal 120, as well as the structure of the defect 121 are all laser radiation One and only one TE mode of is confined in defect 121, while the other mode is configured in such a way that it extends across photon bandgap determination 120. This asymmetrical configuration of the laser 100 is chosen to reduce the total width of the p-doped regions 111, 112, 113, 114, thereby reducing the total resistance of the structure. This is because the defect 121, where the active region 108 is located inside it, is displaced towards the p-contact layer 115. Thick p-doped layer 113 is used to prevent extension of the basic mode to the absorbent p-doped contact layer 114 near the p-contact layer 115 or to the p-contact layer 115 itself. A layer 112 with moderate refractive index is added to reduce the effect of the layer 113 on the laser mode in the defect region 121 and thus maintain the high field strength in the basic mode of the active region 108. Used as In general, layers 111 and 112 are not an essential configuration of the laser of the present invention. [43] The predetermined refractive index profile over the entire structure is calculated as follows. This structure introduces a model structure. The basic TE mode and higher order TE mode are obtained from the solution of the eigenvector problem according to equation (2). When the basic mode is calculated, the primitive field pattern is calculated, which includes Part 2 on Semiconductor Lasers, published in 1978 at Academic Press in New York by H.C.Casey and M.B.Fanisch. The method given in is used. Certain structures are obtained as a result of optimization providing the desired interaction between the lowest beam divergence angle, the maximum amplitude of the fundamental mode of the active medium, and the lowest ratio of the amplitude of the higher mode to the fundamental mode of the active medium. [44] 2, a particular embodiment of the present invention is shown in which defect 121 comprises layers 106, 107, 108, 109, 110. The layers 106, 107, 109, 110 of the defect 121 are preferably thicker than the layer 105 with the same high index of refraction as each layer 105. All layers 105 shown in the embodiment of FIG. 2 have the same thickness. One layer 105 is shown in FIGS. 2-5 as well as in FIG. 2 to demonstrate various possible embodiments of the laser of the present invention. Due to the limitation of the fundamental mode by the defect 121, the electric field strength of the basic mode in the active region is substantially higher than in the other modes. A comparison with the first rank TE mode is shown in FIG. 6. Enhancement of one and only one mode in the active area allows the mode to be filtered efficiently and single mode lasing to be realized. [45] 3 shows another embodiment of the invention in which the defect 121 comprises layers 106, 107, 108, 109, 110. Layers 106, 107, 109, 110 all have the same thickness as each layer 105 and have a refractive index higher than that of each layer 105. As the defect area 121 has such a high refractive index, the defect area is configured to localize the basic mode of laser radiation. [46] 4 shows a laser 400 of another embodiment of the invention in which the defect 421 comprises a low refractive index layer 401. The layer 401 is thinner than the layer 104 of the photon band gap crystal 420. In contrast to the embodiment shown in FIGS. 1-3, the layer 401, which differs in thickness compared to the other layer 104, no longer forms part of the photon gap determination 420, and the defect 421 It is part of). The refractive index of layer 401 is equal to the refractive index of layer 104. Due to the reduced thickness of the layer 401, tunneling of electromagnetic waves between adjacent layers surrounding the layer 401 is enhanced. Thus, the layer 105 adjacent the layer 401 and the defect 421 tend to localize electromagnetic waves. The layer 401 is formed of a material that is lattice matched or nearly lattice matched to the substrate 102 and is preferably translucent to emitted light. In a preferred embodiment, layer 401 is made of the same material as layer 104. [47] FIG. 5 shows a laser 500 of another embodiment of the present invention in which layer 501 separates two layers 105, 106 having a high refractive index. The layer 501 has a medium refractive index between the refractive indices of the layers 104 and 105 of the photon band gap crystal 520. As layer 501 has a moderate refractive index, tunneling of electromagnetic waves between adjacent layers surrounding layer 501 is enhanced. Thus, layer 105 and defect 521 adjacent to layer 501 tend to confine electromagnetic waves. Layer 501 is formed of a lattice matched or near lattice matched material to the substrate and is preferably translucent to emitted light. In a preferred embodiment, layer 501 is made of Ga 1-x Al x As having a moderate aluminum content (x) between the aluminum content of layers 104 and 105. [48] 6 shows the profile of the basic TE mode and the first rank TE mode in the z-direction for the specific realization of the laser of the invention. In particular, this figure shows the laser 100 of the embodiment of FIG. 2. The photonic bandgap crystal 120 has 28 periods, each of which includes a single layer 105 having a high refractive index and a single layer 104 having a low refractive index. The defect 121 is realized by a layer having a high refractive index, and is thicker than the layer 105. In this embodiment, layer 104 and layer 111 each have a desired thickness of 90 nm and are made of Ga 1-x Al x As, where x is 0.55. The layer 105 preferably has a thickness of 900 nm and is made of GaAs. The preferable thickness of the defect 121 is 1.0 micrometer. Layer 112 has a thickness of 400 nm and is made of Ga 1-x Al x As, where x is 0.05. For the laser of this particular embodiment, the refractive index of the layers 105, 106, 110 is preferably 3.590, the refractive index of the layers 104, 111 is 3.227, and the refractive index of the layers 103, 112 is 3.555. It is preferable that the refractive index of the layer 113 is 3.080. 6 shows that the field strength of the basic TE mode of the active region is approximately twice the field strength of the first order TE mode. This is valid for all higher modes. One such embodiment allows for single mode lasing with a far field beam divergence angle of 1.7 °. [49] Yet another embodiment of the present invention encompasses a structure in which localized defects are realized by combining some or all of the variations shown in FIGS. In further embodiments, localized defects are distributed over one or more periods of the photon band gap determination. In another embodiment, the basic TE mode is confined by aperiodic modulation of the refractive index. Other embodiments of the present invention include structures that extend on both sides of a defect in which photon bandgap determinations are localized. [50] FIG. 7 shows a laser 700 of another embodiment of the present invention that recommends the use of an absorber laser 701 to suppress laser radiation in higher mode. The absorber laser 701 is a layer having a high absorption coefficient for emitting light. The absorber layer 701 is preferably disposed in the layer 105 having a high refractive index of the photon band gap crystal 720. The absorber layer 701 includes the active region 108 based on the photon band gap crystal 720. 721 is disposed on the opposite side. Using the absorber layer 701 provides the advantages as described below. The electric field strength of the basic mode collapses and eliminates at defect 721. This collapse is generally in accordance with some reduction index modulated by the vibration factor. In other words, the maximum field strength value within a given period of photon bandgap determination 720 is exponentially collapsed at defect 721. On the other hand, no collapse occurs in higher mode. Due to this phenomenon, the electric field in the far basic mode at defect 721 is considerably weaker than the electric field in other modes, in order of magnitude, for example. By placing the absorber layer 701 having a high absorption coefficient of the emitted light of the photon band gap crystal 720 at such a position, the higher mode is effectively suppressed without affecting the basic mode. As a result, the laser radiation in the high mode can be suppressed, and lasing in a single mode can be realized. It should be noted that the active region 108 and absorber layer 701 typically have a thickness of about 10 nm, which does not significantly affect the profile of the laser emission mode. Accordingly, the layer 105 in which the absorber layer 701 is disposed is considered as part of the photon band gap crystal 720. [51] In a variant of the invention, the absorber layer 701 is disposed inside the first layer 105 of the photonic bandgap crystal 720, but may be disposed inside one of the following layers 105. Another embodiment includes one or more absorber layers 701 disposed in multiple periods of the photon bandgap crystal 720. [52] 8, a laser 800 of another embodiment of the present invention is shown. This embodiment is similar to the laser shown in FIG. 1, where a focused layer 801 is further introduced between a layer with a low refractive index and its neighboring high refractive index layer. The use of this focused layer 801 is a standard semiconductor laser among semiconductor lasers based on GaAs / Ga 1-x Al x As heterostructures. The focused layer 801 provides a continuous change in refractive index. The refractive index of this focused layer is realized by the focused aluminum content (x) of layer 801, which performs a reduction in the resistance of the heterostructure. The thickness of the focused layer 801 preferably exceeds the Debye radius of electrons, which is about 100 GPa at the usual doping level of the semiconductor laser. [53] FIG. 9 shows a laser 900 of another embodiment of the present invention, similar to the embodiment shown in FIG. 7. In addition to the absorber layer 701, a focused layer 801 is introduced between a layer with a low refractive index and a neighboring layer with a high refractive index. The absorber layer 701 suppresses the extension mode, while the focused layer 801 provides a continuous refractive index change. For example, in a semiconductor laser 900 based on a GaAs / Ga 1-x Al x As heterostructure, the focused layer 801 includes a focused aluminum content (x). [54] To illustrate the performance of the actual cross-sectional laser of the present invention, the particular embodiment shown in FIG. 9, which is based on a focused GaAs / Ga 1-x Al x As heterostructure and includes an absorber layer 701, is an example. It is used. This mode is calculated for the particular structure having the refractive index profile shown on the left side of FIG. The photon band gap determination 920 of FIG. 9 includes 13 cycles. The layer 105 having a high refractive index preferably has a thickness of approximately 0.8 mu m and is formed of GaAs. The defect 921 comprising layers 106, 107, 108, 109, 110 has a thickness of approximately 0.9 μm. The active region 108 is disposed in the middle of the defect 921. The low refractive index layer 104 is formed of Ga 1-x Al x As (where x is 0.55) and preferably has a thickness of approximately 600 GPa. The focused layer 801 preferably has a thickness of approximately 400 mm 3. The layer 112 used to provide basic mode attenuation prior to the p-contact layer 114 is approximately 0.3 μm thick and is preferably formed of Ga 1-x Al x As, where x is 0.05. . The aluminum content of layer 113 is 0.8 and the thickness is approximately 0.3 μm. The absorber layer 701 is disposed in the first period of the photon band gap crystal 920 near the substrate 102 side. This absorber layer 701 is in particular arranged in layer 105 asymmetrically close to its layer boundary on the substrate 102 side. It is preferable that the distance from the layer boundary is 0.1 mu m. The waveguide of this particular design was calculated for an emission wavelength of 0.98 μm. The waveguide of the laser of the embodiment of FIG. 9 includes a focused layer 801, n periods of photon band gap determination 920, defects 921, focused layer 801, and a low refractive index layer 111. ), A focused layer 801, a layer 112 having a moderate refractive index, and a focused layer 801. Except for the thickness of the active layer and the absorber layer, the thickness of all the layers forming the waveguide is proportional to the emission wavelength. In the case of the laser of the embodiment of Figure 9, the refractive indices of the layers 105, 106, 110 are preferably 3.590, the refractive indices of the layers 104, 111 are 3.227, and the refractive indices of the layers 103, 112 are It is preferable that it is 3.555, and it is preferable that the refractive index of the layer 113 is 3.080. The refractive index of each focused layer 801 varies gradually between the refractive index values of adjacent layers. [55] 10 shows a first order TE mode and a basic TE mode of the laser 900 of the embodiment of FIG. 9. The constraint rate calculated for the basic mode exceeds 1.5 for the first rank mode. However, due to the rapid collapse of the localized fundamental mode to the depth of the photon band gap crystal 920, the absorbance at that absorber is about two times lower than the absorption at the first order TE mode. [56] In FIG. 11, the first, second, third, and fourth rank TE modes of the laser 900 of the embodiment of FIG. 9 are compared with the basic TE mode. 11 demonstrates that all higher rank TE modes in the absorber have large amplitudes. This "high ranking" mode is all modes except the basic mode. This proves that the base mode is significantly suppressed in the absorber layer 701 as compared to the other modes. The absorption coefficient of each higher rank mode is a value exceeding about 20 than that of the first rank mode and more than 100 above the absorption coefficient of the other mode. This demonstrates the effective separation of the higher rank mode from the basic mode. [57] The total thickness of the n-doped region comprising layers 103, 801, 104, 801 of the laser 900, the n periods of the photon bandgap crystal 920 and the layer 106 is approximately 12 μm. The thickness of the p-doped region comprising layers 110, 801, 111, 801, 112, 801, 113, 801, 114 is approximately 1 μm. In the laser 900, the cladding layer is the leftmost layer 104 having a low refractive index and the layer 113 having a low refractive index, and the width of the waveguide is preferably 13.16 mu m. Referring to the constraint ratio of the basic mode of the laser shown in Fig. 9, this constraint ratio is convenient to compare with the constraint ratio of the reference laser. As a reference laser, a double heterostructure laser having a waveguide having a width of 0.8 mu m and a cladding layer of Ga 0.7 Al 0.3 As is used. Therefore, the constraint ratio of the basic mode of the laser shown in FIG. 9 is about 0.1 of the constraint ratio of the reference laser. The constraint rate of the laser of the present invention can be doubled without affecting the mode profile by using a dual quantum well structure as the active region 108. This makes it possible to achieve lasing with a reasonable low limit current density. [58] Fig. 12 is shown in the far field diagram of the basic TE mode of this embodiment. The full width at half, the maximum of the far field diagram, is 4 °. Thus, calculations performed on the sample laser structure allow for the production of an effective single mode laser having a narrow (4 °) beam divergence angle and an rational constraint of the basic TE mode. [59] FIG. 13 shows another embodiment of the present invention for a laser 1300 similar to the laser shown in FIG. 1, with two layers 1301 added. The thin film layer 1301 surrounds the active region 108. These layers 1301 are formed of a material that forms a latent barrier for a carrier. These layers 1301 prevent evaporation of carriers from the active region, providing high temperature stability of the laser 1300. These layers 1301, on the one hand, tunnel the electrons from the n-doped layer 106 to the active region 108 and the tunneling of holes from the p-doped layer 110 to the active region 108. It should be thin enough to promote P, and, on the other hand, should be sufficient to prevent evaporation of the carrier from the active region 108 at high temperatures, thus enhancing the thermal stability of the laser 1300. In this embodiment, these layers 1301 are preferably formed of a Ga 1-x Al x As alloy having a high aluminum content (x). The thickness and aluminum content of the layer 1301 may allow for effective tunneling of the carrier to the active region 108 without excessively increasing the resistance of the laser structure while preventing evaporation of the carrier from the active region 108. It is optimized. Typical thickness of layer 1301 is thinner than 5 nm and typical aluminum content is at least 0.4. [60] Another embodiment of the invention with respect to a laser 1400 similar to the laser 700 shown in FIG. 7, in which two layers 1301 are added to prevent evaporation of carriers from the active region 108. An embodiment is shown. Photon band gap determination 1420 and defect 1421 are also included in laser 1400. The absorber layer 701 is adapted to effectively suppress the extension mode and surrounds the active region 108 with a thin film barrier 1301 to prevent evaporation of carriers from the active region, thereby providing high temperature stability of the laser 1400. do. [61] FIG. 15 shows another embodiment of the present invention for a laser 1500 similar to the laser 800 of FIG. 8, with two layers 1301 added to resist evaporation of carriers from the active region 108. It is. The photon band gap determination 1520 and the defect 1521 are also included in the laser 1500. The focused layer 801 provides a continuous change in refractive index, and the thin film barrier 1301 surrounding the active region 108 prevents evaporation of carriers from the active region 108, thereby improving the high temperature stability of the laser. Providing. [62] FIG. 16 shows another embodiment of the present invention for a laser 1600 similar to the laser 900 of FIG. 9 with two layers 1301 added to resist evaporation of carriers from the active region 108. It is. The photon band gap determination 1620 and the defect 1621 are also included in the laser 1600. The absorber layer 701 effectively suppresses the extension mode, and the focused layer 801 provides a continuous refractive index change. The thin film barrier 1301 surrounding the active region 108 prevents the evaporation of carriers from the active region 108, thus providing high temperature stability of the laser. [63] FIG. 17 shows a laser 1700 of another embodiment of the present invention where the active region is disposed in one of the layers of the photon band crystal 1720 and the defect 1721 has only passive elements. In this particular embodiment shown in FIG. 17, an n-doped layer 1706 and a lightly n-doped or undoped layer 1707, active region 1708, lightly p-doped or undoped layer 1709, and the p-doped layer 1710 are disposed at the rightmost period of the photon band gap crystal 1720. The layers 1706, 1707, 1708, 1709, 1710 are preferably formed of the same material as the layers 106, 107, 108, 109, 110 of other embodiments of the present invention. Layer 1704 is a low refractive index p-doped layer. It is formed of a material that is lattice matched or nearly lattice matched to the substrate 102 and is translucent to the emitted light and should be p-doped. In a preferred embodiment, layer 1704 is formed of the same material as layer 104 but is p-doped. Defect 1721 shown in FIG. 17 includes a high refractive index p-doped layer 1722. The localized effect of the basic mode of laser radiation is realized in the same way as described in the embodiment of FIG. The defect 1721 has the same refractive index as the other layer 105 having a higher refractive index, and is thicker than the layer 105. [64] A variant of the invention is similar to that described above, except that the active layer is located outside of the defect. For example, the defect can be realized by a single layer having a higher index of refraction than the layer 105 of the photonic bandgap crystal, similar to the embodiment of FIG. Optionally, the defect includes two layers of high refractive index, with a low refractive index layer interposed therebetween. The low refractive index layer is thinner than the layer 104 of photonic bandgap crystals, similar to the embodiment of FIG. 4. According to another embodiment, the defect is formed by two layers having a high refractive index and a medium refractive index interposed therebetween, the medium refractive index being similar to the embodiment of FIG. It is the value between the refractive indices of the layers 104 and 105 of the crystal. [65] Other embodiments of the present invention include structures in which the active layer is disposed outside of localized defects, the localized defects themselves being realized by combining some or all of the variations shown in FIGS. In further embodiments, localized defects are distributed over one or more periods of the photon band gap determination. In another embodiment, the refractive index is modulated slightly aperiodically to limit the basic TE mode. Another embodiment of the invention includes a structure that extends on both sides of a defect in which photon bandgap crystals are localized. [66] Another embodiment incorporates an absorber layer similar to the embodiment of FIG. 7, but the active layer includes a structure located outside of the localized defect. Further embodiments include structures in which the active layer is outside of localized defects, and similarly to the embodiment of FIG. 8, a focused layer is introduced between a low refractive index layer and its neighboring high refractive index layer. . Another embodiment where the active layer is located outside of the confined region, similar to the embodiment of FIG. 13, includes a thin film tunnel barrier for the carrier surrounding the active layer. In other embodiments of the present invention, the active layer may be located outside of the confined region and may include some or all of the elements, such as absorber layers, focused layers, and thin-film tunnel barriers for carriers surrounding the active layer. . Other embodiments of the invention include structures in which defects are located on the n-side or p-side from the active element. [67] In a variant of the invention, only a portion of the laser structure is formed of photon band gap crystals, which provide effective filtration of laser radiation in higher mode. Additional embodiments in which the active medium and the photon bandgap crystals are spatially separated and disposed in different portions of the laser structure are also included in the scope of the present invention. In another embodiment of the present invention, the photon bandgap crystal is mounted on each side of the single-sided light emitting laser to promote effective filtration of the laser radiation in the high mode while providing effective single mode lasing. [68] A further embodiment of the present invention relates to a waveguide, for example one and only one mode of propagating light is localized in a high refractive index defect area and collapsed and removed in cross section from the defect area while all other modes Is directed to an optical fiber whose refractive index is modulated in a direction perpendicular to the direction of light propagation so as to extend over the entire cross section of the waveguide. Refractive index modulation in this manner allows the application of absorbers or dissipators that do not alter the propagation of single mode light by preventing propagation of all modes except one mode. This embodiment realizes an effective single mode waveguide, for example a single mode optical fiber, even in the case of thick fibers. [69] A further embodiment of the present invention includes photon bandgap determination, in which refractive index modulation is made in a direction perpendicular to the light propagation direction, as in all embodiments of the present invention, but in which light propagates in a direction perpendicular to the pn junction plane. do. This embodiment is preferably a vertical resonant surface emitting laser (VCSEL). [70] In particular, referring to FIG. 18, one embodiment of a VCSEL 1800 using a photon band gap determination 1820 according to the present invention is shown. 18, a special photon band gap determination in which refractive index modulation is performed in a direction perpendicular to the light propagation direction is realized. Such a structure is formed on the substrate 102 by epitaxial growth. Substrate 102 is preferably formed of a III-V semiconductor material or a III-V semiconductor alloy, such as GaAs, InP, GaSb or other alloys as in other embodiments of the present invention. In a preferred embodiment, GaAs is used. It is preferable that a Bragg reflector is used for the lower mirror 1801. The remainder of the VCSEL 1800 includes an area above the active area consisting of two main elements, first, an active element above the lower mirror 1801, and second, a photon band gap determination 1820 and a defect 1821. Photon bandgap crystal 1820 includes a layer 1811 into which vertical columns 1810 having different refractive indices are inserted. [71] In order to form the active element 1806, the current hole 1804 has an n-doped current spreading layer 1802 having a first metal contact 1803 and the lightly doped layer 1805 surrounding the active element 1806. 1807). Second current hole 1804 separates lightly doped layer 1807 from p-doped current spreading layer 1808 with second metal contact 1809. Each layer is separated from the neighboring layer by a current hole 1804 which acts as a current blocking layer, and is preferably formed of an Al (Ga) O layer or a photon impact layer. [72] The active element 1806 is preferably formed by insertion, the energy band gap being narrower than the energy band gap of the substrate 102. Possible active elements include, but are not limited to, monolayer or multilayer systems of quantum well structures, quantum wire structures, quantum dot structures, or combinations thereof. In the case of devices on GaAs substrates, preferred materials for the active element include, but are not limited to, InAs, In 1-x Ga x As, In x Ga 1-xy Al y As, In x Ga 1-x As Included are systems with inserts of 1-y N y , or similar materials. [73] The n-doped layer 1802 is formed of a material that is lattice matched or nearly lattice matched to the substrate 102 and is transmissive to the generated light and preferably doped with donor impurities. This n-doped layer is made of the same material as n-emitter 103 of the other embodiments. The p-doped layer 1808 is formed of a material that is lattice matched or nearly lattice matched to the substrate, which is transmissive to the generated light, and is preferably doped with acceptor impurities. It is preferably made of the same material as the p-emitter 114 of another embodiment. The n-contact 1803 is preferably formed of the same material as the n-contact 101 of another embodiment, and the p-contact 1809 is preferably formed of the same material as the p-contact 115 of another embodiment. Do. [74] The n-doped current spreading layer 1802 is directly seated on the top surface of the lower mirror 1801. This layer 1811 is subjected to a selective etching process followed by a subsequent heterostructure overgrowth forming vertical column 1810 made of another material. This area 1821 is a defect that limits the basic lateral mode of laser radiation. [75] The distributed Bragg reflector may also be used for the top mirror 1813 located on the top surface of the region containing the photon band gap determination 1820 and the defect 1821. Active element 1806 acts under conventional forward bias 1814 for the VCSEL. Light is emitted to the outside 1815 through the top mirror 1813. [76] Bottom mirror 1801 and top mirror 1813 are described in Volume 10, Vertical Resonance, entitled Optoelectronic properties of semiconductors and superlattices, for example by DGDeppe. Surface Technology Lasers and Techniques and Applications of 2000, edited by J. Cheng and NKDutta through Gordon and Breach Science Publisher Different designs as described on the page can be used. Preferred embodiments include multilayer dielectric GaAs / AlGaO mirrors. [77] A particular design of the photon band gap crystal includes alternatingly arranged columns 1810, 1811, defects 1821, and current holes 1804. This design should be optimized so that only the fundamental lateral mode of laser radiation confined by defect 1821 overlaps the active layer significantly more than all higher modes extending over the entire lateral plane. This design promotes effective single mode lasing. This particular embodiment has been developed, for example, by RD Meade et al. And published in Physics Rev. B48: 11 8434-8437 (1993), "Accurate theoretical analysis of photonic bandgap material. band gap materials), which is calculated by solving the three-dimensional light propagation problem in non-homogeneous media. [78] In other embodiments of the VCSEL, the photon band gap crystals are formed by selective etching, without causing overgrowth by dielectric or metallic coatings or other patterning techniques on the surface. The type of patterning used in these examples should facilitate the localization of the fundamental lateral mode of laser radiation in defects and thus achieve a large width overlaid coalescing of active media with one and only one mode. All these approaches enable effective single mode lasing. [79] While the present invention has been illustrated and described with reference to exemplary embodiments, those skilled in the art can make such and other changes, omissions, and additions to the present invention without departing from the spirit and scope of the invention. It should be understood that it may be. Accordingly, the present invention should not be construed as limited to the specific embodiments set forth above, but include all possible embodiments that may be embodied within the scope and range of equivalents thereof in connection with the features described in the claims below. Should be understood.
权利要求:
Claims (115) [1" claim-type="Currently amended] a) an n-doped region having at least a portion thereof a photonic band gap crystal, the photon band gap crystal having a layered structure in which the refractive index is modulated periodically; b) a defect having a light generating layer adjacent to said photon bandgap crystal, i) emitting light when exposed to an injection current when forward bias is applied; And c) a p-doped layered structure having a variable refractive index that prevents extension of the fundamental mode to the p-contact with at least one doped layer, While the fundamental mode of laser radiation is confined by this defect, all instrumental modes extend across the photon band gap determination, And providing a beam divergence angle having a narrow total thickness of the photon band gap determination and defects. [2" claim-type="Currently amended] The method of claim 1, d) an n-emitter adjacent the photonic bandgap crystal opposite the defect; e) a substrate adjacent said n- emitter opposite said defect; And f) further comprising an n-contact adjacent said substrate opposite said defect. [3" claim-type="Currently amended] The method of claim 2, g) a p-emitter adjacent said p-doped layered structure opposite said defect; And h) further comprising a p-contact adjacent said p- emitter opposite said defect. [4" claim-type="Currently amended] The method of claim 1, wherein the defect is ii) a first active element located on the n-side of the light generating layer; iii) a second active element located on the p-side of the light generating layer; iv) a thick n-doped layer adjacent said first active element layer opposite said light generating layer; And v) further comprising a thick p-doped layer adjacent said second active element layer opposite said light generating layer. [5" claim-type="Currently amended] 5. The semiconductor sectional laser of claim 4, wherein the first active element layer is formed of a material selected from the group consisting of a lightly doped n-layer and an undoped layer. [6" claim-type="Currently amended] 5. The semiconductor sectional laser of claim 4, wherein the second active element layer is formed of a material selected from the group consisting of a lightly doped p-layer and an undoped layer. [7" claim-type="Currently amended] The semiconductor single-sided light emitting laser according to claim 1, wherein the layered structure of the photon band gap crystal is formed by alternately arranging a first layer having a high refractive index and a second layer having a low refractive index. [8" claim-type="Currently amended] 8. The photonic band gap crystal according to claim 7, wherein the defect further comprises a region adjacent to the light generating layer on both sides, each of which has a refractive index equal to the refractive index of the first layer of the photon band gap crystal. A semiconductor sectional emission laser, characterized in that it is thicker than the first layer of. [9" claim-type="Currently amended] 8. The method of claim 7, wherein the defect further comprises an area adjacent to the light generating layer on both sides, the area having the same thickness as the first layer of the photon band gap crystals and the refractive index of the photon band gap crystals. And a refractive index higher than that of the first layer and the second layer. [10" claim-type="Currently amended] 8. The defect of claim 7, wherein the defect comprises a first layer of the photon band gap crystal adjacent thereto, a third layer of low refractive index adjacent to the first layer opposite the photon band gap crystal, and the photon band And a fourth layer having a high index of refraction adjacent said third layer opposite said spacing crystal, said fourth layer being thinner than the second layer of the photon bandgap crystal. [11" claim-type="Currently amended] 8. The photonic band gap crystal of claim 7, wherein the defect is a first layer of the photon band gap crystal adjacent thereto and opposite the refractive index of the first layer and the photon band gap crystal. And a third layer having a moderate refractive index between the refractive indices of the second layers of and a fourth layer having a high refractive index adjacent to the third layer opposite to the photon band gap crystals. Luminous laser. [12" claim-type="Currently amended] 2. The semiconductor sectional laser of claim 1, wherein the defect extends over a plurality of periods of the photon band gap crystal. [13" claim-type="Currently amended] 2. The semiconductor sectional laser of claim 1, wherein the photon band gap determination comprises aperiodic refractive index modulation. [14" claim-type="Currently amended] 2. The semiconductor sectional laser of claim 1, further comprising at least one absorbing layer that absorbs light and is located inside one of the first layers of the photon band gap crystal. [15" claim-type="Currently amended] 15. The semiconductor sectional laser according to claim 14, wherein a plurality of absorbing layers are each positioned inside each different period of the photon band gap crystal. [16" claim-type="Currently amended] The semiconductor single-sided light emitting laser according to claim 14, wherein the layered structure of the photon band gap crystal is formed by alternately arranging a first layer having a high refractive index and a second layer having a low refractive index. [17" claim-type="Currently amended] 17. The method of claim 16, wherein the defect further comprises an area adjacent to the light generating layer on both sides, the area having the same refractive index as the first layer of the photon band gap crystals, wherein A semiconductor sectional emission laser, characterized in that it is thicker than the first layer. [18" claim-type="Currently amended] 17. The method of claim 16, wherein the defect further comprises an area adjacent to the light generating layer on both sides, the area having the same thickness as the first layer of the photon band gap crystals and wherein It has a refractive index higher than 1 layer and a 2nd layer, The semiconductor single-sided light emitting laser characterized by the above-mentioned. [19" claim-type="Currently amended] 18. The photonic band according to claim 17, wherein the defect is a first layer of the photon band gap crystal adjacent thereto, a third layer having a low refractive index adjacent to the first layer opposite the photon band gap crystal, and the photon band And a fourth layer having a high refractive index adjacent to the third layer opposite the spacing crystal, wherein the fourth layer is thinner than the second layer of the photon band gap crystal. [20" claim-type="Currently amended] 18. The photonic band gap crystal of claim 17, wherein the defect is a first layer of the photon band gap crystal adjacent thereto and opposite the refractive index of the first layer and the photon band gap crystal. And a third layer having a moderate refractive index between the refractive indices of the second layers of and a fourth layer having a high refractive index adjacent to the third layer opposite to the photon band gap crystals. Luminous laser. [21" claim-type="Currently amended] 15. The semiconductor light emitting laser of claim 14, wherein the defect extends over a plurality of periods of the photon band gap crystal. [22" claim-type="Currently amended] 15. The semiconductor sectional laser of claim 14, wherein the photon band gap determination is realized by aperiodic refractive index modulation. [23" claim-type="Currently amended] 15. The layered structure of the photon band gap crystal is formed by alternately arranging a first layer having a high refractive index, a focused layer, a second layer having a low refractive index, and another focused layer. Semiconductor cross-sectional light emission laser. [24" claim-type="Currently amended] 24. The semiconductor sectional laser of claim 23, wherein all heterojunctions of the doped region are realized by a focused layer. [25" claim-type="Currently amended] 25. The method of claim 24, wherein the defect further comprises an area adjacent to the light generating layer on both sides, the area having the same refractive index as the first layer of the photon band gap crystal while A semiconductor sectional emission laser, characterized in that it is thicker than the first layer. [26" claim-type="Currently amended] 25. The device of claim 24, wherein the defect further comprises an area adjacent to the light generating layer on both sides, the area having the same thickness as the first layer of the photon band gap crystal. It has a refractive index higher than 1 layer and a 2nd layer, The semiconductor single-sided light emitting laser characterized by the above-mentioned. [27" claim-type="Currently amended] 25. The method of claim 24, wherein the defect comprises a first layer of the photon band gap crystal adjacent thereto, a third layer of low refractive index adjacent the first layer opposite the photon band gap crystal, and the photon band And a fourth layer having a high index of refraction adjacent said third layer opposite said spacing crystal, said fourth layer being thinner than the second layer of the photon bandgap crystal. [28" claim-type="Currently amended] 25. The photonic band gap crystal of claim 24, wherein said defect is adjacent to said first layer of said photon band gap crystal and said refractive index of said first layer and said photon band gap crystal are opposite. And a third layer having a moderate refractive index between the refractive indices of the second layers of and a fourth layer having a high refractive index adjacent to the third layer opposite to the photon band gap crystals. Luminous laser. [29" claim-type="Currently amended] 25. The laser of claim 24, wherein the defect extends over a plurality of periods of the photon band gap crystal. [30" claim-type="Currently amended] 25. The semiconductor sectional laser of claim 24, wherein the photon band gap determination is realized by aperiodic refractive index modulation. [31" claim-type="Currently amended] The layered structure of the photon band gap crystal is formed by alternately arranging a first layer having a high refractive index, a focused layer, a second layer having a low refractive index, and another focused layer. Semiconductor cross-sectional light emission laser. [32" claim-type="Currently amended] 32. The semiconductor sectional laser of claim 31, wherein all heterojunctions of the doped region are realized by a focused layer. [33" claim-type="Currently amended] 33. The method of claim 32, wherein the defect further comprises an area adjacent to the light generating layer on both sides, the area having the same refractive index as the first layer of the photon band gap crystals, wherein A semiconductor sectional emission laser, characterized in that it is thicker than the first layer. [34" claim-type="Currently amended] 33. The device of claim 32, wherein the defect further comprises an area adjacent to the light generating layer at both sides, the area having the same thickness as the first layer of the photon band gap crystals, It has a refractive index higher than a 1st layer and a 2nd layer. [35" claim-type="Currently amended] 33. The method of claim 32, wherein the defect comprises a first layer of the photon band gap crystal adjacent thereto, a third layer of low refractive index adjacent to the first layer opposite the photon band gap crystal, and the photon band And a fourth layer having a high index of refraction adjacent said third layer opposite said spacing crystal, said fourth layer being thinner than the second layer of the photon bandgap crystal. [36" claim-type="Currently amended] 33. The photonic band gap crystal of claim 32, wherein said defect is adjacent to said first layer of said photon band gap crystal and said refractive index of said first layer and said photon band gap crystal are opposite. And a third layer having a moderate refractive index between the refractive indices of the second layers of and a fourth layer having a high refractive index adjacent to the third layer opposite to the photon band gap crystals. Luminous laser. [37" claim-type="Currently amended] 33. The laser of claim 32, wherein said defect extends over a plurality of periods of said photon band gap crystal. [38" claim-type="Currently amended] 33. The semiconductor sectional laser of claim 32, wherein the photon band gap determination is realized by aperiodic refractive index modulation. [39" claim-type="Currently amended] a) an n-doped region having at least a portion thereof a photonic band gap crystal, the photon band gap crystal having a layered structure in which the refractive index is modulated periodically; b) a defect adjacent to the photon bandgap determination; And c) a p-doped layered structure having a variable refractive index that prevents extension of the fundamental mode to the p-contact with at least one doped layer, The defect is i) a light generating layer emitting light when exposed to an injection current when forward bias is applied; ii) a first thin film tunnel barrier layer for electrons, positioned on the n-side of said light generating layer, formed of a material selected from the group consisting of a lightly doped n-layer and an undoped layer; iii) a second thin film tunnel barrier layer for holes, which is located on the p-side of the light generating layer and is formed of a material selected from the group consisting of a lightly doped p-layer and an undoped layer; iv) two layers of said first thin film tunnel barrier layer sandwiched therebetween; And v) the second thin film tunnel barrier layer has two layers sandwiched therebetween, While the fundamental mode of laser radiation is confined by the defect, all other modes extend across the photon band gap determination, And the total thickness of the photon bandgap determination and defect provides a narrow beam divergence angle. [40" claim-type="Currently amended] The method of claim 39, d) an n-emitter adjacent the photonic bandgap crystal opposite the defect; e) a substrate adjacent said n- emitter opposite said defect; And f) further comprising an n-contact adjacent said substrate opposite said defect. [41" claim-type="Currently amended] The method of claim 40, g) a p-emitter adjacent said p-doped layered structure opposite said defect; And h) further comprising a p-contact adjacent said p- emitter opposite said defect. [42" claim-type="Currently amended] 40. The method of claim 39, wherein the defect is vi) a thick n-doped layer adjacent the layer between which the first thin film tunnel barrier layer is sandwiched opposite the light generating layer; And vii) further comprising a thick p-doped layer adjacent the layer between which the second thin film tunnel barrier layer is sandwiched opposite the light generating layer. [43" claim-type="Currently amended] 40. A semiconductor sectional laser as set forth in claim 39, wherein both layers sandwiching the first thin film tunnel barrier layer are formed of a material selected from the group consisting of lightly doped n- and undoped layers. . [44" claim-type="Currently amended] 40. The semiconductor of claim 39 wherein at least one of the layers between which the first thin film tunnel barrier is sandwiched is formed of a material selected from the group consisting of lightly doped n- and undoped layers. Single-sided laser. [45" claim-type="Currently amended] 40. The semiconductor sectional laser of claim 39, wherein both layers of the second tunnel thin film barrier layer sandwiched therebetween are formed of a material selected from the group consisting of a lightly doped p-layer and an undoped layer. . [46" claim-type="Currently amended] 40. The semiconductor of claim 39 wherein at least one of the layers interposed therebetween is formed of a material selected from the group consisting of lightly doped p- and undoped layers. Single-sided laser. [47" claim-type="Currently amended] 40. The semiconductor sectional laser according to claim 39, wherein the layered structure of the photon band gap crystal is formed by alternately arranging a first layer having a high refractive index and a second layer having a low refractive index. [48" claim-type="Currently amended] 48. The method of claim 47, wherein the defect further comprises an area adjacent to the light generating layer on both sides, the area having the same refractive index as the first layer of the photon band gap crystals and wherein each of the respective photon band gap crystals has a refractive index. A semiconductor sectional emission laser, characterized in that it is thicker than the first layer. [49" claim-type="Currently amended] 48. The method of claim 47, wherein the defect further comprises an area adjacent to the light generating layer on both sides, the area having the same thickness as the first layer of the photon band gap crystals, It has a refractive index higher than 1 layer and a 2nd layer, The semiconductor single-sided light emitting laser characterized by the above-mentioned. [50" claim-type="Currently amended] 48. The method of claim 47, wherein the defect comprises: a first layer of the photon band gap crystal adjacent thereto, a third layer of low refractive index adjacent the first layer opposite the photon band gap crystal, and the photon band And a fourth layer having a high index of refraction adjacent said third layer opposite said spacing crystal, said fourth layer being thinner than the second layer of the photon bandgap crystal. [51" claim-type="Currently amended] 48. The photonic band gap crystal of claim 47, wherein said defect is adjacent to said first layer of said photon band gap crystal and said refractive index of said first layer and said photon band gap crystal are opposite. And a third layer having a moderate refractive index between the refractive indices of the second layers of and a fourth layer having a high refractive index adjacent to the third layer opposite to the photon band gap crystals. Luminous laser. [52" claim-type="Currently amended] 48. The laser of claim 47, wherein said defect extends over a plurality of periods of said photon bandgap crystal. [53" claim-type="Currently amended] 40. The semiconductor sectional laser of claim 39, wherein the photon band gap determination is realized by aperiodic refractive index modulation. [54" claim-type="Currently amended] 40. The laser of claim 39, further comprising at least one absorbing layer that absorbs light and is located within one of the first layers of the photon band gap crystals. [55" claim-type="Currently amended] 55. The semiconductor sectional laser of claim 54, wherein the plurality of absorbing layers are each positioned inside different periods of the photon band gap crystal. [56" claim-type="Currently amended] 55. The semiconductor sectional laser according to claim 54, wherein the layered structure of the photon band gap crystal is formed by alternately arranging a first layer having a high refractive index and a second layer having a low refractive index periodically. [57" claim-type="Currently amended] 55. The method of claim 54, wherein the defect further comprises an area adjacent to the light generating layer on both sides, the area having the same refractive index as the first layer of the photon band gap crystals, wherein each of the respective photonic band gap crystals has a refractive index. A semiconductor sectional emission laser, characterized in that it is thicker than the first layer. [58" claim-type="Currently amended] 55. The device of claim 54, wherein the defect further comprises an area adjacent to the light generating layer on both sides, the area having the same thickness as the first layer of the photon band gap crystals, It has a refractive index higher than 1 layer and a 2nd layer, The semiconductor single-sided light emitting laser characterized by the above-mentioned. [59" claim-type="Currently amended] 55. The photonic band of claim 54, wherein the defect is a first layer of the photon band gap crystal adjacent thereto, a third layer of low refractive index adjacent to the first layer opposite the photon band gap crystal, and the photon band And a fourth layer having a high index of refraction adjacent said third layer opposite said spacing crystal, said fourth layer being thinner than the second layer of the photon bandgap crystal. [60" claim-type="Currently amended] 55. The photonic band gap crystal of claim 54, wherein said defect is adjacent to said first layer of said photon band gap crystal and said refractive index of said first layer and said photon band gap crystal are opposite. And a third layer having a moderate refractive index between the refractive indices of the second layers of and a fourth layer having a high refractive index adjacent to the third layer opposite to the photon band gap crystals. Luminous laser. [61" claim-type="Currently amended] 55. The semiconductor sectional laser of claim 54, wherein said defect extends over a plurality of periods of said photon band gap crystal. [62" claim-type="Currently amended] 55. The semiconductor sectional laser according to claim 54, wherein said photon band gap determination is realized by aperiodic refractive index modulation. [63" claim-type="Currently amended] 40. The layered structure of the photon band interval crystal according to claim 39, wherein the layered structure of the photon band gap crystal is formed by alternately arranging a first layer having a high refractive index, a focused layer, a second layer having a low refractive index, and another focused layer. Semiconductor cross-sectional light emission laser. [64" claim-type="Currently amended] 66. The semiconductor sectional laser of claim 63, wherein all heterojunctions of the doped region are realized by a focused layer. [65" claim-type="Currently amended] 65. The method of claim 64, wherein the defect further comprises an area adjacent to the light generating layer at both sides, the area having the same refractive index as the first layer of the photon band gap crystals, wherein A semiconductor sectional emission laser, characterized in that it is thicker than the first layer. [66" claim-type="Currently amended] 65. The method of claim 64, wherein the defect further comprises an area adjacent to the light generating layer on both sides, the area having the same thickness as the first layer of the photon band gap crystals, It has a refractive index higher than 1 layer and a 2nd layer, The semiconductor single-sided light emitting laser characterized by the above-mentioned. [67" claim-type="Currently amended] 65. The method of claim 64, wherein the defect comprises a first layer of the photon band gap crystal adjacent thereto, a third layer of low refractive index adjacent to the first layer opposite the photon band gap crystal, and the photon band And a fourth layer having a high index of refraction adjacent said third layer opposite said spacing crystal, said fourth layer being thinner than the second layer of the photon bandgap crystal. [68" claim-type="Currently amended] 65. The photonic band gap crystal of claim 64, wherein said defect is adjacent to said first layer of said photon band gap crystal and said refractive index of said first layer and said photon band gap crystal are opposite. And a third layer having a moderate refractive index between the refractive indices of the second layers of and a fourth layer having a high refractive index adjacent to the third layer opposite to the photon band gap crystals. Luminous laser. [69" claim-type="Currently amended] 65. The laser according to claim 64, wherein said defect extends over a plurality of periods of said photon band gap crystal. [70" claim-type="Currently amended] 65. The semiconductor sectional laser according to claim 64, wherein said photon band gap determination is realized by aperiodic refractive index modulation. [71" claim-type="Currently amended] 55. The layered structure of the photon band gap crystal according to claim 54, wherein the layered structure of the photon band gap crystal is formed by alternately arranging a first layer having a high refractive index, a focused layer, a second layer having a low refractive index, and another focused layer. Semiconductor cross-sectional light emission laser. [72" claim-type="Currently amended] 74. The semiconductor sectional laser of claim 71, wherein all heterojunctions of the doped region are realized by a focused layer. [73" claim-type="Currently amended] 73. The method of claim 72, wherein the defect further comprises an area adjacent to the light generating layer on both sides, the area having the same refractive index as the first layer of the photon band gap crystals, wherein A semiconductor sectional emission laser, characterized in that it is thicker than the first layer. [74" claim-type="Currently amended] 73. The device of claim 72, wherein the defect further comprises an area adjacent to the light generating layer on both sides, the area having the same thickness as the first layer of the photon band gap crystals, It has a refractive index higher than 1 layer and a 2nd layer, The semiconductor single-sided light emitting laser characterized by the above-mentioned. [75" claim-type="Currently amended] 73. The photonic band of claim 72, wherein the defect is a first layer of the photon band gap crystal adjacent to the defect, a third layer of low refractive index adjacent to the first layer opposite the photon band gap crystal, and the photon band And a fourth layer having a high index of refraction adjacent said third layer opposite said spacing crystal, said fourth layer being thinner than the second layer of the photon bandgap crystal. [76" claim-type="Currently amended] 73. The photonic band gap crystal of claim 72, wherein said defect is adjacent to said first layer of said photon band gap crystal and said refractive index of said first layer and said photon band gap crystal are opposite. And a third layer having a medium refractive index between the refractive indices of the second layers of and a fourth layer having a high refractive index adjacent to the third layer opposite to the photon band gap crystals. Luminous laser. [77" claim-type="Currently amended] 73. The laser of claim 72, wherein said defect extends over a plurality of periods of said photon bandgap crystal. [78" claim-type="Currently amended] 73. The semiconductor sectional laser according to claim 72, wherein said photon band gap determination is realized by aperiodic refractive index modulation. [79" claim-type="Currently amended] a) at least a portion of the photonic bandgap crystal, which has a layered structure and an active element whose refractive index is modulated periodically, which is exposed to an injection current when forward bias is applied; An n-doped region having a light generating layer for emitting light; b) a defect adjacent to the photon bandgap determination; And c) a p-doped layered structure having a variable refractive index that prevents extension of the fundamental mode to the p-contact with at least one doped layer, While the fundamental mode of laser radiation is confined by the defect, all other modes extend across the photon band gap determination, And the total thickness of the photon bandgap determination and defect provides a narrow beam divergence angle. [80" claim-type="Currently amended] 80. The method of claim 79 wherein d) an n-emitter adjacent the photonic bandgap crystal opposite the defect; e) a substrate adjacent said n- emitter opposite said defect; And f) further comprising an n-contact adjacent said substrate opposite said defect. [81" claim-type="Currently amended] 81. The method of claim 80, g) a p-emitter adjacent said p-doped layered structure opposite said defect; And h) further comprising a p-contact adjacent said p- emitter opposite said defect. [82" claim-type="Currently amended] 80. The method of claim 79, wherein the active element is ii) a first active element layer located on the n-side of the light generating layer; iii) a second active element layer located on the p-side of the light generating layer; iv) a thick n-doped layer adjacent said first active element layer opposite said light generating layer; And v) further comprising a thick p-doped layer adjacent said second active element layer opposite said light generating layer. [83" claim-type="Currently amended] 80. The semiconductor sectional laser according to claim 79, wherein the layered structure of the photon band gap crystal is formed by alternately arranging a first layer having a high refractive index and a second layer having a low refractive index. [84" claim-type="Currently amended] 84. The photonic bandgap of claim 83, wherein said defect comprises a layer adjacent said photon bandgap crystal opposite said substrate, said layer of defects having a refractive index equal to the refractive index of the first layer of the photon bandgap crystal. A semiconductor single-sided light emitting laser, characterized in that it is thicker than each said first layer of crystals. [85" claim-type="Currently amended] 84. The device of claim 83, wherein the defect comprises a layer adjacent to the light generating layer opposite the substrate, the layer having the same thickness as the first layer of the photon band gap crystals and the refractive index of the photon band gap crystals. And a refractive index higher than that of the first layer and the second layer. [86" claim-type="Currently amended] 84. The method of claim 83, wherein the defect is a third layer having a high refractive index adjacent to the photon band gap crystals opposite the substrate and a fourth layer having a low refractive index adjacent to the third layer opposite the photon band gap crystals. And a fifth layer having a high index of refraction adjacent to the fourth layer opposite the photon band gap crystal, wherein the fourth layer is thinner than the second layer of the photon band gap crystal. . [87" claim-type="Currently amended] 84. The method of claim 83, wherein the defect is adjacent to the third layer having a high refractive index adjacent to the photon band gap crystal on the opposite side of the substrate, and opposite to the third layer opposite to the refractive index of the first layer and the photon band gap crystal. And a fourth layer having a medium refractive index between the refractive indices of the second layer of the photon band gap crystals, and a fifth layer having a high refractive index adjacent to the fourth layer opposite to the photon band gap crystals. Semiconductor sectional laser. [88" claim-type="Currently amended] 80. The laser of claim 79, wherein said defect extends over a plurality of periods of said photon band gap crystal. [89" claim-type="Currently amended] 80. The semiconductor sectional laser according to claim 79, wherein said photon band gap determination is realized by aperiodic refractive index modulation. [90" claim-type="Currently amended] 84. The semiconductor sectional laser of claim 83, further comprising at least one absorbing layer that absorbs light and is located inside one of the first layers of the photon band gap crystals. [91" claim-type="Currently amended] 95. The semiconductor sectional laser of claim 90, wherein the plurality of absorbing layers are each positioned inside one different period of the photon band gap crystal. [92" claim-type="Currently amended] 95. The semiconductor sectional laser according to claim 90, wherein the layered structure of the photon band gap crystal is formed by alternately arranging a first layer having a high refractive index and a second layer having a low refractive index. [93" claim-type="Currently amended] 93. The method of claim 92, wherein the defect comprises a layer adjacent the photon band crystal on the opposite side of the substrate, the layer of the defect having the same refractive index as the first layer of the photon band gap crystal, A semiconductor single-sided light emitting laser, characterized in that it is thicker than each of said first layers. [94" claim-type="Currently amended] 93. The device of claim 92, wherein the defect comprises a layer adjacent the photon band crystal on the opposite side of the substrate, the layer having the same thickness as the first layer of the photon band crystal. A semiconductor sectional emission laser having a higher refractive index than the first layer and the second layer. [95" claim-type="Currently amended] 93. The semiconductor device of claim 92 wherein the defect is a third layer having a high refractive index adjacent to the photon band gap crystals opposite the substrate and a fourth layer having a low refractive index adjacent to the third layer opposite the photon band gap crystals. And a fifth layer having a high index of refraction adjacent to the fourth layer opposite the photon band gap crystal, wherein the fourth layer is thinner than the second layer of the photon band gap crystal. . [96" claim-type="Currently amended] 93. The semiconductor device of claim 92, wherein the defect is adjacent to the third layer having a high refractive index adjacent to the photon band gap crystal on the opposite side of the substrate, and opposite the refractive index of the first layer and the photon band gap crystal. And a fourth layer having a medium refractive index between the refractive indices of the second layer of the photon band gap crystals, and a fifth layer having a high refractive index adjacent to the fourth layer opposite to the photon band gap crystals. Semiconductor sectional laser. [97" claim-type="Currently amended] 91. The semiconductor sectional laser as recited in claim 90, wherein said defect extends over a plurality of periods of said photon band gap crystal. [98" claim-type="Currently amended] 93. The semiconductor sectional laser according to claim 90, wherein said photon band gap determination is realized by aperiodic refractive index modulation. [99" claim-type="Currently amended] 80. The layered structure of the photon band interval crystal according to claim 79, wherein the layered structure of the photon band gap crystal is formed by alternately arranging a first layer having a high refractive index, a focused layer, a second layer having a low refractive index, and another focused layer. Semiconductor cross-sectional light emission laser. [100" claim-type="Currently amended] 100. The semiconductor sectional laser of claim 99, wherein all heterojunctions of the doped region are realized by a focused layer. [101" claim-type="Currently amended] 103. The photonic band gap crystal of claim 100, wherein the defect includes a layer adjacent the photon band crystal on the opposite side of the substrate, the layer of defect having the same refractive index as the first layer of the photon band gap crystal. A semiconductor single-sided light emitting laser, characterized in that it is thicker than each of said first layers. [102" claim-type="Currently amended] 101. The method of claim 100, wherein the defect comprises a layer adjacent to the photon band crystal on the opposite side of the substrate, the layer having the same thickness as the first layer of the photon band gap crystal and A semiconductor sectional emission laser having a higher refractive index than the first layer and the second layer. [103" claim-type="Currently amended] 101. The semiconductor device of claim 100, wherein the defect comprises a third layer having a high refractive index adjacent to the photon band gap crystal opposite the substrate and a fourth layer having a low refractive index adjacent to the third layer opposite the photon band gap crystal. And a fifth layer having a high index of refraction adjacent to the fourth layer opposite the photon band gap crystal, wherein the fourth layer is thinner than the second layer of the photon band gap crystal. . [104" claim-type="Currently amended] 101. The semiconductor device of claim 100, wherein the defect includes a third layer having a high refractive index adjacent to the photon band gap crystal on the opposite side of the substrate, and a third layer opposite the refractive index of the first layer and the photon band gap crystal on the opposite side of the substrate. And a fourth layer having a medium refractive index between the refractive indices of the second layers of adjacent photon band gap crystals, and a fifth layer having a high refractive index adjacent to the fourth layer opposite the photon band gap crystals. Semiconductor cross-sectional light emission laser. [105" claim-type="Currently amended] 101. The semiconductor sectional laser according to claim 100, wherein said defect extends over a plurality of periods of said photon band gap crystal. [106" claim-type="Currently amended] 101. The semiconductor sectional laser according to claim 100, wherein the photon band gap determination is realized by aperiodic refractive index modulation. [107" claim-type="Currently amended] 93. The layered structure of the photon band gap crystal according to claim 90, wherein the layered structure of the photon band gap crystal is formed by alternately arranging a first layer having a high refractive index, a focused layer, a second layer having a low refractive index, and another focused layer. Semiconductor cross-sectional light emission laser. [108" claim-type="Currently amended] 108. The semiconductor sectional laser of claim 107, wherein all heterojunctions of the doped region are realized by a focused layer. [109" claim-type="Currently amended] 109. The photonic band gap crystal of claim 108, wherein the defect includes a layer adjacent the photon band crystal on the opposite side of the substrate, the layer of the defect having the same refractive index as the first layer of the photon band gap crystal. A semiconductor single-sided light emitting laser, characterized in that it is thicker than each of said first layers. [110" claim-type="Currently amended] 109. The device of claim 108, wherein the defect includes a layer adjacent the photon band crystal on the opposite side of the substrate, the layer having the same thickness as the first layer of the photon band crystal. A semiconductor sectional emission laser having a higher refractive index than the first layer and the second layer. [111" claim-type="Currently amended] 109. The semiconductor device of claim 108, wherein the defect is a third layer having a high refractive index adjacent to the photon band gap crystal opposite the substrate and a fourth layer having a low refractive index adjacent to the third layer opposite the photon band gap crystal. And a fifth layer having a high index of refraction adjacent to the fourth layer opposite the photon band gap crystal, wherein the fourth layer is thinner than the second layer of the photon band gap crystal. . [112" claim-type="Currently amended] 109. The semiconductor device of claim 108, wherein the defect is adjacent to the third layer adjacent to the photon band gap crystal on the opposite side of the substrate, and to the opposite of the refractive index of the first layer and the photon band gap crystal. And a fourth layer having a medium refractive index between the refractive indices of the second layer of the photon band gap crystals, and a fifth layer having a high refractive index adjacent to the fourth layer opposite to the photon band gap crystals. Semiconductor sectional laser. [113" claim-type="Currently amended] 109. The semiconductor light emitting laser of claim 108, wherein said defect extends over a plurality of periods of said photon band gap crystal. [114" claim-type="Currently amended] 109. The semiconductor sectional laser of claim 108, wherein said photon band gap determination is realized by aperiodic refractive index modulation. [115" claim-type="Currently amended] a) a substrate; b) a lower mirror formed by a Bragg reflector region above the substrate; c) an active element above said lower mirror; d) an element representing a photon band gap determination above said active element; And e) an upper mirror formed by the Bragg reflector region above the photon band gap crystal, The active element, i) a light generating layer emitting light when exposed to an injection current when forward bias is applied; ii) an n-doped current spreading region below the light generating layer above the substrate; iii) a p-doped current spreading region over said light generating layer; iv) current holes disposed between each neighboring region; And v) an active element bias control device between the n-doped current diffusion region and the p-doped current diffusion region so that current can be injected into the light generating layer to generate light, The element representing the photon band gap determination is, i) an area in which the refractive index is modulated in a direction perpendicular to the light propagation direction; And ii) A semiconductor laser provided at a central portion of the region, wherein light is propagated in a vertical direction to a p-n junction, characterized by having a defect that defines a lateral fundamental mode of laser radiation.
类似技术:
公开号 | 公开日 | 专利标题 JP4047718B2|2008-02-13|Quantum dash device US6222871B1|2001-04-24|Vertical optical cavities produced with selective area epitaxy US6711200B1|2004-03-23|Tuneable photonic crystal lasers and a method of fabricating the same US4802182A|1989-01-31|Monolithic two dimensional waveguide coupled cavity laser/modulator EP0676839B1|1999-07-07|Unipolar semiconductor laser US5737474A|1998-04-07|Semiconductor optical device US7560298B2|2009-07-14|Methods for producing a tunable vertical cavity surface emitting laser EP0759217B1|1998-10-07|Strain-compensated multiple quantum well laser structures US7496127B2|2009-02-24|Optical device coupling light propagating in optical waveguide with diffraction grating US7031360B2|2006-04-18|Tilted cavity semiconductor laser | and method of making same CA1137605A|1982-12-14|High output power laser US8917752B2|2014-12-23|Reflectivity-modulated grating mirror KR100457028B1|2004-11-16|Semiconductor laser device and method for fabricating the same EP0829121B1|1998-10-28|Dfb laser diode structure with complex optical grating coupling US7668220B2|2010-02-23|Single mode vertical cavity surface emitting laser using photonic crystals with a central defect US6816525B2|2004-11-09|Quantum dot lasers JP2959902B2|1999-10-06|Semiconductor laser, device having the same, and method of manufacturing the same CA2521005C|2011-02-08|Two-dimensional photonic crystal surface-emitting laser JP4275948B2|2009-06-10|Controlling modes using transverse band gap structures in VCSELs DE60313140T2|2007-07-19|Quantum nano composition semiconductor laser and quantum nano composition array JP4829119B2|2011-12-07|Monolithic optical pumping VCSEL with laterally mounted edge emitters US4875216A|1989-10-17|Buried waveguide window regions for improved performance semiconductor lasers and other opto-electronic applications Mizuta et al.2006|All semiconductor low-Δ photonic crystal waveguide for semiconductor optical amplifier US7254155B1|2007-08-07|High power single mode vertical cavity surface emitting laser CN100514777C|2009-07-15|Semiconductor laser element
同族专利:
公开号 | 公开日 WO2003021726A2|2003-03-13| EP1436867A2|2004-07-14| US20030043870A1|2003-03-06| CN1701476A|2005-11-23| DE60220430D1|2007-07-12| EP1436867A4|2005-07-27| US20040208215A1|2004-10-21| IL160688D0|2004-08-31| US6804280B2|2004-10-12| US6996148B2|2006-02-07| US20040076213A1|2004-04-22| US6928099B2|2005-08-09| WO2003021726A3|2004-02-26| AT363756T|2007-06-15| JP2005502207A|2005-01-20| DE60220430T2|2008-01-24| EP1436867B1|2007-05-30| AU2002329021A1|2003-03-18|
引用文献:
公开号 | 申请日 | 公开日 | 申请人 | 专利标题
法律状态:
2001-09-04|Priority to US09/946,016 2001-09-04|Priority to US09/946,016 2002-08-29|Application filed by 피비씨 레이저스 리미티드 2002-08-29|Priority to PCT/IL2002/000718 2004-04-29|Publication of KR20040035752A
优先权:
[返回顶部]
申请号 | 申请日 | 专利标题 US09/946,016|US6804280B2|2001-09-04|2001-09-04|Semiconductor laser based on the effect of photonic band gap crystal-mediated filtration of higher modes of laser radiation and method of making the same| US09/946,016|2001-09-04| PCT/IL2002/000718|WO2003021726A2|2001-09-04|2002-08-29|A semiconductor laser| 相关专利
Sulfonates, polymers, resist compositions and patterning process
Washing machine
Washing machine
Device for fixture finishing and tension adjusting of membrane
Structure for Equipping Band in a Plane Cathode Ray Tube
Process for preparation of 7 alpha-carboxyl 9, 11-epoxy steroids and intermediates useful therein an
国家/地区
|